Application of Plasma Polymerized Films to a Vacuum Lithography

Plasma Polymerized Thin Films Materials: Synthesis, Characterization, and Application Tests

Organic–inorganic hybrid co-polymer thin films were deposited on silicon(100) substrates under the several ratio of TEOS (tetraethoxysilane) against cyclohexene by plasma enhanced chemical vapour deposition (PECVD) method. Toluene and TEOS were utilized as organic and inorganic precursors each, and hydrogen and argon were also used as a bubbler and carrier gases, respectively. In order to compa...

Growth kinetics of plasma-polymerized films

The growth kinetics of polymer thin films prepared by plasma-based deposition method were explored using atomic force microscopy. The growth behavior of the first layer of the polythiophene somewhat differs from that of the other layers because the first layer is directly deposited on the substrate, whereas the other layers are deposited on the polymer itself. After the deposition of the first ...

Responsive plasma polymerized ultrathin nanocomposite films

The plasma polymerization of NIPAAM and titanium isopropoxide monomers into responsive ultrathin films with responsive optical properties using plasma enhanced chemical vapor deposition is reported. The composite ultrathin films possess a large window for potential changes in their refractive index from 1.60 to 1.95. We demonstrated that these polymer films exhibit fast (transition time below 2...

Vacuum-ultraviolet plasma Frenkel excitons: elementary excitations of polymerized fullerene

The high-frequency excitations of the molecular insulator C60 are investigated theoretically. The model of a quantum well rolled into a sphere is used to calculate the dipole ~multipole in the general case! modes of an individual C60 cluster. If the spectrum and oscillator strengths of the collective modes of an individual cluster are known, the microscopic continuum approach can be used to cal...

Ultra-thin plasma polymerized allylamine films for cardiovascular stent coating